Growth of Grains Effect on Boron Diffusion in Heavily Implanted Polycrystalline silicon Thin Films.

Salah Abadli Farida Mansour

Published in: ICMENS (2006)

Keyphrases

thin film
grain size
high density
solar cell
plasma etching
chemical vapor deposition
short circuit
low density
anisotropic diffusion
multi layer
data center
database
neural network
low cost
film thickness