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Efficient electron beam condensing for low-energy microcolumn lithography.
Ho Seob Kim
Seungjoon Ahn
Dae Wook Kim
Tae-Sik Oh
Seong Joon Ahn
Published in:
Microelectron. J. (2008)
Keyphrases
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electron beam
low energy
integrated circuit
cost effective
x ray
electron microscopy
minimum energy
design parameters
semiconductor devices
protein folding
electron beam lithography
neural network
power consumption
coarse grained