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Modeling and control of thin film morphology using unsteady processing parameters: Problem formulation and initial results.
Martha A. Gallivan
David G. Goodwin
Richard M. Murray
Published in:
CDC (2001)
Keyphrases
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thin film
short circuit
real time
high density
control system
grain size
maximum likelihood
data processing
electron microscopy
multi layer
solar cell
control parameters
control method
databases
control strategy
data acquisition
expert systems
database systems
film thickness
chemical vapor deposition