A Virtual IC Factory in an Undergraduate Semiconductor Device Fabrication Laboratory.
A. AsenovC. R. StanleyPublished in: EUROSIM (1995)
Keyphrases
- semiconductor devices
- integrated circuit
- electron beam
- field effect transistors
- virtual laboratory
- chemical engineering
- high density
- plasma etching
- virtual lab
- virtual reality
- virtual environment
- wafer fabrication
- force feedback
- computer science
- augmented reality
- engineering courses
- production line
- virtual world
- virtual laboratories
- mixed reality
- online environment
- low density
- computer science courses
- artificial intelligence
- laser pointer
- low power
- computer science curriculum
- input device
- programming course
- multistage