Electronic properties of GeySi1-y: H films deposited by LF PECVD at low temperatures.

Ismael Cosme Andrey Kosarev F. Temoltzi A. Itzmoyotl

Published in: CCE (2011)

Keyphrases

chemical vapor deposition
thin film
data sets
electrical properties
neural network
high density
film thickness
database
knowledge base
design automation