Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing.
Chia-Yu HsuWei-Chen LiuPublished in: J. Intell. Manuf. (2021)
Keyphrases
- empirical studies
- semiconductor manufacturing
- fault detection and diagnosis
- convolutional neural network
- empirical analysis
- fault diagnosis
- real world data sets
- discrete event simulation
- fault detection
- uci datasets
- pairwise
- experimental design
- fault detection and isolation
- process control
- neural network
- rbf neural network
- production system
- support vector machine
- expert systems