Daily Scheduling for R&D Semiconductor Fabrication.
Da-Yin LiaoShi-Chung ChangShou-Ren YenCheng-Chung ChienPublished in: ICRA (3) (1993)
Keyphrases
- wafer fabrication
- plasma etching
- semiconductor devices
- scheduling problem
- high density
- round robin
- rate distortion
- scheduling algorithm
- semiconductor manufacturing
- electron beam lithography
- flexible manufacturing systems
- low density
- preventive maintenance
- resource constraints
- integrated circuit
- minimize total
- job shop
- real time
- electron beam
- manufacturing cell
- field effect transistors
- genetic algorithm
- neural network
- data sets