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Room temperature sensing of VOCs by atomic layer deposition of metal oxide.
Akhilesh Tanneeru
Steven Mills
Michael Lim
Marzana M. Mahmud
James Dieffenderfer
Alper Bozkurt
Troy Nagle
Bongmook Lee
Veena Misra
Published in:
IEEE SENSORS (2016)
Keyphrases
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metal oxide
room temperature
thin film
x ray
solid state
multi layer
film thickness
high speed
sensor networks
magnetic field
image sensor
real time
si sio
high density
database
low cost
thermal conductivity
neural network
plasma etching