A protected tungsten-rhenium thin film thermocouples sensor.
Zhongkai ZhangBian TianQiuyue YuQijing LinNa ZhaoWeixuan JingZhuangde JiangPublished in: NEMS (2017)
Keyphrases
- thin film
- high density
- sensor data
- short circuit
- solar cell
- grain size
- sensor networks
- white light interferometry
- multi layer
- multi sensor
- electron microscopy
- genetic algorithm
- plasma etching
- databases
- decision support system
- room temperature
- film thickness
- decision makers
- control system
- decision making
- machine learning