A Platform with Exquisite Film Profile Engineering in Oxide-Based Thin-Film Transistors for More-than-Moore Applications.
Horng-Chih LinYu-An HuangPublished in: ASICON (2019)
Keyphrases
- thin film
- high density
- film thickness
- room temperature
- electron microscopy
- silicon nitride
- electrical properties
- field effect transistors
- low density
- grain size
- short circuit
- solar cell
- white light interferometry
- user profiles
- multi layer
- data center
- low power
- databases
- refractive index
- power consumption
- fuel cell
- software engineering