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Chip-level TSV integration for rapid prototyping of 3D system LSIs.

Kazuyuki HozawaFutoshi FurutaYuko HanaokaMayu AokiKenichi TakedaKatsuyuki SakumaKang Wook LeeTakafumi FukushimaMitsumasa Koyanagi
Published in: 3DIC (2011)
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