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Electrical properties of micro-heaters using sputtered NiCr thin film.
Ting-Ting Wu
Jing-Quan Liu
Shui-Dong Jiang
Bin Xu
Bin Yang
Hongying Zhu
Chunsheng Yang
Published in:
NEMS (2013)
Keyphrases
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electrical properties
thin film
film thickness
silicon nitride
energy saving
high density
multi layer
short circuit
room temperature
grain size
solar cell
electron microscopy
artificial neural networks
white light interferometry
management system