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Investigations of silicon wafer bonding using thin Al and Sn films for heterogeneous integration.
Zhiyuan Zhu
Shaonan Wang
Yichao Xu
Guanjiang Wang
Yudan Pi
Peiquan Wang
Yunhui Zhu
Xin Sun
Min Yu
Jing Chen
Min Miao
Yufeng Jin
Published in:
NEMS (2013)
Keyphrases
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silicon dioxide
space charge
heterogeneous databases
integrated circuit
heterogeneous data sources
chemical vapor deposition
distributed heterogeneous
databases
real world
high speed
data fusion
transmission electron microscopy
database
data integration