Fabrication of electrostatically actuated silicon nitride microshutter arrays.

L. Oh M. Li K. Kim D. Kelly A. Kutyrev S. Moseley

Published in: IEEE SENSORS (2017)

Keyphrases

electrical properties
high density
thin film
integrated circuit
control scheme
high temperature
control law
high speed
plasma etching
real time
databases
motion tracking
open loop
force control
closed loop
magnetic recording
database management systems
thin film transistor