Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr, Ti)O_3 Thin Films.
Kensuke KandaYu AkashiTakashi SaitoTakayuki FujitaKohei HiguchiKazusuke MaenakaPublished in: ICETET (2012)
Keyphrases
- thin film
- high density
- plasma etching
- chemical vapor deposition
- grain size
- low density
- short circuit
- control system
- liquid crystal displays
- integrated circuit
- multi layer
- closed loop
- high speed
- room temperature
- solar cell
- database
- low cost
- supervised learning
- fuzzy logic
- digital signal processor
- viewpoint
- artificial neural networks
- databases