Sign in
Growth and fabrication of AlGaN/GaN HEMT based on Si(1 1 1) substrates by MOCVD.
Weijun Luo
Xiaoliang Wang
Hongling Xiao
Cuimei Wang
Junxue Ran
Lunchun Guo
Jianping Li
Hongxin Liu
Yanling Chen
Fuhua Yang
Jinmin Li
Published in:
Microelectron. J. (2008)
Keyphrases
</>
high density
chemical vapor deposition
thin film
plasma etching
low density
solar cell
integrated circuit
high speed
structuring elements
electron beam
databases
growth model
magnetic recording
efficient implementation
computer vision
real world
data sets
real time