Nanoadhesion layer for enhanced Si-Si and Si-SiN wafer bonding.

Ryuichi Kondou Chenxi Wang Akitsu Shigetou Tadatomo Suga

Published in: Microelectron. Reliab. (2012)

Keyphrases

metal oxide
si sio
genetic algorithm
database replication
database
decision making
image processing
clustering algorithm
database systems
computational complexity
distributed systems