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Layout decomposition for hybrid E-beam and DSA double patterning lithography.
Yunfeng Yang
Fan Yang
Wai-Shing Luk
Changhao Yan
Xuan Zeng
Xiangdong Hu
Published in:
ISCAS (2017)
Keyphrases
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electron beam
electron beam lithography
integrated circuit
real time
neural network
x ray
computer vision
decomposition algorithm
learning algorithm
website
multiscale
decomposition method
decomposition methods
hybrid approaches
text fragments
layout design