Layout decomposition for hybrid E-beam and DSA double patterning lithography.

Yunfeng Yang Fan Yang Wai-Shing Luk Changhao Yan Xuan Zeng Xiangdong Hu

Published in: ISCAS (2017)

Keyphrases

electron beam
electron beam lithography
integrated circuit
real time
neural network
x ray
computer vision
decomposition algorithm
learning algorithm
website
multiscale
decomposition method
decomposition methods
hybrid approaches
text fragments
layout design