As MOS capacitors from capacitance-voltage characteristics measured at various temperatures.
Chunmeng DouDennis LinAbhitosh VaisTsvetan IvanovHan-Ping ChenKoen MartensKuniyuki KakushimaHiroshi IwaiYuan TaurAaron TheanGuido GroesenekenPublished in: Microelectron. Reliab. (2014)