Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications.
Florian BartoliJérémy StrequeJaafar GhanbajaPhilippe PigeatPascal BouletSami Hage-AliNatalya NaumenkoA. RedjaïmiaThierry AubertOmar ElmazriaPublished in: Sensors (2020)