Login / Signup
A novel fault detection approach based on multilinear sparse PCA: application onthe semiconductor manufacturing processes.
Riadh Toumi
Yahia Kourd
Dimitri Lefebvre
Published in:
Turkish J. Electr. Eng. Comput. Sci. (2022)
Keyphrases
</>
fault detection
manufacturing processes
fault diagnosis
industrial processes
condition monitoring
decision making
rapid prototyping
real time
computer vision
decision makers
fault identification