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A comparison of thin film microrefrigerators based on Si/SiGe superlattice and bulk SiGe.
Younès Ezzahri
G. Zeng
K. Fukutani
Zhixi Bian
Ali Shakouri
Published in:
Microelectron. J. (2008)
Keyphrases
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solar cell
thin film
chance discovery
plasma etching
chemical vapor deposition
high density
short circuit
multi layer
grain size
electric field
risk management
room temperature
white light interferometry
databases
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knowledge discovery
wireless sensor networks
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