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Preparation of one-dimensional photonic crystal with variable period by using ultra-high vacuum electron beam evaporation.
Su Chen
Zhitang Song
Yang Wang
Duanzheng Yao
Published in:
Microelectron. J. (2007)
Keyphrases
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ultra high
electron beam
integrated circuit
x ray
data handling
high resolution
design parameters
semiconductor devices
physical characteristics
data management
expert systems
data mining
artificial intelligence
three dimensional
high quality
fuzzy logic