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Formation of high-purity organic thin films by gas flow deposition and the effect of impurities on device characteristics.
Kohei Tsugita
Tomohiko Edura
Masayuki Yahiro
Chihaya Adachi
Published in:
Displays (2013)
Keyphrases
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thin film
high density
genetic algorithm
chemical vapor deposition
grain size
short circuit
plasma etching
solar cell
film thickness
databases
multi layer
white light interferometry
three dimensional
flow field
flow rate