films for Cu interconnects.

Seol-Min Yi Kwang-Ho Jang Jung-Uk An Sang-Soo Hwang Young-Chang Joo

Published in: Microelectron. Reliab. (2008)

Keyphrases

electron microscopy
input output
grain size
lower cost
fiber optic
thin film
mechanical properties
database
silicon dioxide
data structure
evolutionary algorithm
multiresolution
medical images
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