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Receiving Properties of Thin-Film Spiral Antenna Fabricated on Fused-Quartz Substrate Backed by Cupper Plate Reflector.

Le Ngoc SonTakashi TachikiTakashi UchidaYoshizumi Yasuoka
Published in: IEICE Trans. Electron. (2012)
Keyphrases
  • thin film
  • film thickness
  • high density
  • high speed
  • data fusion
  • multi layer
  • white light interferometry
  • electron microscopy
  • short circuit
  • shape from shading
  • electron beam
  • plasma etching