-plasma treated yittrium-oxynitride as interfacial passivation layer.

H. H. Lu J. P. Xu L. Liu L. S. Wang P. T. Lai W. M. Tang

Published in: Microelectron. Reliab. (2016)

Keyphrases

multi layer
high energy
data sets
search engine
image processing
database systems
high density
thin film
data mining
case study
bayesian networks
preprocessing
medical images
scanning electron microscope
plasma etching