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H. H. Lu
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 1
Top Topics
Scanning Electron Microscope
Preprocessing
High Energy
Thin Film
Top Venues
Microelectron. Reliab.
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Publications
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H. H. Lu
,
J. P. Xu
,
L. Liu
,
L. S. Wang
,
P. T. Lai
,
W. M. Tang
-plasma treated yittrium-oxynitride as interfacial passivation layer.
Microelectron. Reliab.
56 (2016)