SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors.
J. F. SouzaM. B. LimaI. DoiP. J. TatschJ. A. DinizJ. L. GonçalvesPublished in: BIODEVICES (2012)