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Investigation of fluorine containing plasma activation for room-temperature bonding of Si-based materials.
Chenxi Wang
Tadatomo Suga
Published in:
Microelectron. Reliab. (2012)
Keyphrases
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room temperature
thin film
chemical vapor deposition
solar cell
plasma etching
thermal conductivity
composite materials
high density
multi layer
magnetic field
information processing
learning materials
digital forensics
high energy
scanning electron microscope
neural nets