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Integrated Scratch Marker for Wafer Defect Diagnosis.
Katherine Shu-Min Li
Leon Li-Yang Chen
Peter Yi-Yu Liao
Sying-Jyan Wang
Andrew Yi-Ann Huang
Ken Chau-Cheung Cheng
Published in:
ITC-Asia (2021)
Keyphrases
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model based diagnosis
medical diagnosis
fault diagnosis
automatic diagnosis
artificial intelligence
computer vision
database systems
fault detection
semiconductor manufacturing
databases
genetic algorithm
integrated circuit
defect detection
cancer diagnosis
diagnostic reasoning
disease diagnosis