Regression methods for prediction of PECVD Silicon Nitride layer thickness.
Hendrik PurwinsAhmed NagiBernd BarakUwe HockeleAndreas KyekBenjamin LenzGunter PfeiferKurt WeinzierlPublished in: CASE (2011)
Keyphrases
- regression methods
- regression model
- linear regression
- prediction model
- prediction accuracy
- kernel regression
- ridge regression
- regression method
- regression algorithm
- logistic regression
- multi layer
- machine learning
- silicon dioxide
- model selection
- data mining
- electrical properties
- regression analysis
- least squares
- bayesian networks
- neural network