Uwe Hockele

Publication Activity (10 Years)

Years Active: 2011-2011
Publications (10 Years): 0

Publications

Hendrik Purwins, Ahmed Nagi, Bernd Barak, Uwe Hockele, Andreas Kyek, Benjamin Lenz, Gunter Pfeifer, Kurt Weinzierl
Regression methods for prediction of PECVD Silicon Nitride layer thickness. CASE (2011)