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Benjamin Lenz
Publication Activity (10 Years)
Years Active: 2011-2013
Publications (10 Years): 0
Top Topics
Machine Learning
Hybrid Genetic
Support Vector Regression
Semiconductor Manufacturing
Top Venues
HICSS
ICMLA (2)
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Publications
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Benjamin Lenz
,
Bernd Barak
,
Julia Mührwald
,
Carolin Leicht
Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models.
ICMLA (2)
(2013)
Benjamin Lenz
,
Bernd Barak
Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology.
HICSS
(2013)
Hendrik Purwins
,
Ahmed Nagi
,
Bernd Barak
,
Uwe Hockele
,
Andreas Kyek
,
Benjamin Lenz
,
Gunter Pfeifer
,
Kurt Weinzierl
Regression methods for prediction of PECVD Silicon Nitride layer thickness.
CASE
(2011)