Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models.
Benjamin LenzBernd BarakJulia MührwaldCarolin LeichtPublished in: ICMLA (2) (2013)
Keyphrases
- semiconductor manufacturing
- machine learning models
- process control
- predictive model
- discrete event simulation
- machine learning algorithms
- spam filtering
- machine learning approaches
- production system
- machine learning
- control system
- camera calibration
- decision trees
- learning models
- learning algorithm
- real time
- semi supervised learning
- bayesian networks