Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology.
Benjamin LenzBernd BarakPublished in: HICSS (2013)
Keyphrases
- support vector regression
- semiconductor manufacturing
- data mining
- machine learning
- process control
- support vector machine
- support vector classification
- support vector
- hybrid genetic
- pattern recognition
- knowledge discovery
- data mining techniques
- text mining
- discrete event simulation
- support vector machine svm
- regression model
- hybrid model
- computer vision
- response surface methodology
- association rules
- data sets
- kernel function
- camera calibration
- image sequences
- decision trees
- feature selection
- artificial intelligence
- wavelet frame