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New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis.

Norbert HerfurthAnne BeyreutherElham AminiChristian BoitMichél Simon-NajasekSusanne HübnerFrank AltmannR. HerfurthChen WuIngrid De WolfKris Croes
Published in: IRPS (2019)
Keyphrases
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