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A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems.
Ha-Duong Ngo
Biswajit Mukhopadhyay
Piotr Mackowiak
Kevin Kröhnert
Oswin Ehrmann
Klaus-Dieter Lang
Published in:
Micromachines (2016)
Keyphrases
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high temperature
silicon dioxide
low power
low cost
high speed
multiscale
database
high density
secret sharing scheme
cmos technology
diesel engine