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Novel Conductometric Sensor for Detecting Pollen Using Semiconductor Thin-Film.

Ren HoriuchiTomiharu YamaguchiKazuhiro Hara
Published in: IEEE SENSORS (2019)
Keyphrases
  • thin film
  • plasma etching
  • sensor networks
  • short circuit
  • sensor data
  • multi layer
  • grain size
  • solar cell
  • high density
  • multi sensor
  • databases
  • electron microscopy
  • white light interferometry
  • film thickness