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Excitation of hypersound in n-GaN films.
F. Diaz
Volodymyr Grimalsky
Margarita Tecpoyotl-Torres
J. Escobedo-Alatorre
Svetlana V. Koshevaya
Published in:
Microelectron. J. (2008)
Keyphrases
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grain size
structuring elements
film restoration
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metal oxide
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spatial distribution
radio frequency
chemical vapor deposition
electron micrographs