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Yield Prediction for Integrated Circuits Manufacturing Through Hierarchical Bayesian Modeling of Spatial Defects.

Tao YuanSaleem Z. RamadanSuk Joo Bae
Published in: IEEE Trans. Reliab. (2011)
Keyphrases
  • integrated circuit
  • bayesian modeling
  • printed circuit boards
  • gaussian process
  • spatial data
  • quality control
  • manufacturing process
  • visual inspection
  • process planning
  • electron beam