Stress intensities at the triple junction of a multilevel thin film package.

Insu Jeon Ki-Ju Kang Seyoung Im

Published in: Microelectron. Reliab. (2008)

Keyphrases

thin film
high density
solar cell
short circuit
multi layer
room temperature
white light interferometry
electron microscopy
grain size
plasma etching
space charge
database
machine learning
artificial neural networks
neural nets
film thickness