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Online Measurement of Deposit Surface in Electron Beam Freeform Fabrication.
Shuhe Chang
Haoyu Zhang
Haiying Xu
Xinghua Sang
Li Wang
Dong Du
Baohua Chang
Published in:
Sensors (2019)
Keyphrases
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light source
electron beam
free form
integrated circuit
x ray
semiconductor devices
design parameters
online learning
active sampling
three dimensional
electron beam lithography
real time
complex scenes
real world
shape modeling