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Vapor Deposition Polymerization and Electrical Characterization of TPD Thin Films.

Masakazu MuroyamaAyako TajiriKyoko IchidaSeiji YokokuraKuniaki TanakaEiji OtsukiHiroaki Usui
Published in: IEICE Trans. Electron. (2011)
Keyphrases
  • thin film
  • short circuit
  • high density
  • plasma etching
  • chemical vapor deposition
  • multi layer
  • film thickness
  • grain size
  • solar cell
  • diffusion process
  • three dimensional
  • low cost