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Patterning and Annealing Effects of Aerosol Deposited Hygroscopic Films for Humidity Sensors.
Alok Kumar
Cong Wang
Fanyi Meng
Tian Qiang
Jun-Ge Liang
Jong-Min Oh
Nam-Young Kim
Published in:
IEEE SENSORS (2018)
Keyphrases
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electrical properties
sensor networks
monitoring system
data acquisition
chemical vapor deposition
data fusion
permalloy films
simulated annealing
real time
energy consumption
sensor data
sensor fusion
rf sputtering
grain size
health monitoring
multi sensor
video sequences
data sets