Microfabricated Thin Film Impedance Sensor & AC Impedance Measurements.

Jinsong Yu Chung-Chiun Liu

Published in: Sensors (2010)

Keyphrases

thin film
electron microscopy
high density
grain size
short circuit
multi layer
transmission line
sensor measurements
sensor networks
multi sensor
room temperature
decision support system
sensor data
waveguide
plasma etching