Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices.
Carlo TrigonaSuhail Ahmed AlmaniAlireza MehdiGiuliano A. SalernoVincenzina StranoAusrine BartasyteSamuel MargueronSalvatore BaglioQuentin MicardPublished in: ROSE (2024)