ZnO thin films produced by the RF magnetron sputtering.

Huawa Yu Jing Wang Yangan Yan Xin Wang Bin Gao Hanchen Liu Yali Du

Published in: EMEIT (2011)

Keyphrases

thin film
film thickness
high density
multi layer
radio frequency
short circuit
grain size
relevance feedback
white light interferometry
magnetic field
solar cell
database
room temperature
data warehouse
chemical vapor deposition
artificial neural networks
plasma etching