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: A Comparative Study of Chemical Vapour Deposited and Epitaxial Graphene.
Margus Kodu
Artjom Berholts
Tauno Kahro
Jens Eriksson
Rositsa Yakimova
Tea Avarmaa
Indrek Renge
Harry Alles
Raivo Jaaniso
Published in:
Sensors (2019)
Keyphrases
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electrical properties
thin film
chemical vapor deposition
electron microscopy
silicon nitride
film thickness
comparative study
high density
chemical engineering
machine learning
learning algorithm
chemical compounds
chemical reaction
artificial intelligence