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Deposition of Pd nanoparticles on ultrathin Al2O3 films.

Qi-Hui WuT. PetramC. BeckerK. Wandelt
Published in: NEMS (2010)
Keyphrases
  • electrical properties
  • film thickness
  • room temperature
  • thin film
  • gate dielectrics
  • chemical vapor deposition
  • plasma etching
  • case study
  • permalloy films
  • multi agent
  • multiresolution